MEMS imec SiGeMEMS

imec CMORE SiGeMEMS MPW

Imec’s CMORE Silicon Germanium MEMS platform technology, referred to as SiGeMEMS, is developed to enable monolithic integration of CMOS and MEMS. Systems integrating MEMS devices with the driving and readout electronics on the same die lead to better performances in terms of signal to noise ratio through reduced interconnect parasitic resistance and capacitance, allow for smaller die size and package, and also for lower power consumption. SiGeMEMS is based on a MEMS-last approach which allows state-of-the-art CMOS foundries to be employed.


Technology The SiGeMEMS process, belonging to imec’s CMORE service platform, is very versatile. Thanks to its flexible and modular approach, allowing application-specific tuning and optimization, it addresses a large number of applications like gyro’s, switches, µmicrophones, µspeakers, CMUTs, T-sensors, P-sensors, ... and array type devices like µmirrors, probe-based memories, and arrays for µfluidics and µpower generation... EUROPRACTICE now offers a fixed baseline SiGeMEMS process in a Multi-Project Wafer Service. This unique baseline process consists of MEMS structures defined by an electrode layer and a 4μm-thick SiGe-mechanical layer on top of a TSMC 0.18um CMOS wafer. Nanogaps of 500nm will allow fabrication of extremely small features. A standalone MEMS version, identical but processed on a wafer with a single metal layer, will be available for initial prototyping.
Advantages of SiGeMEMS
	Monolithic integration with IC : Very compact Best solution for applications that are very sensitive to parasitics High intrinsic system reliability: less components, less interconnections.

	MEMS last above CMOS : Most flexible with respect to choice of CMOS technology Extremely well suited for MEMS array applications very high-density and massively parallel interconnections possible like arge arrays of MEMS (e.g. μmirror arrays) Poly-SiGe : High performance: low parasitics Good mechanical properties & reliability better than Al: higher strength and Q factor better than Al: less creep and fatigue

Summary of SiGeMEMS main features and dimensions




General conditions :
	EUROPRACTICE SiGeMEMS MPW Service is accessible for universities and research institutes. (EUROPRACTICE registered members) more info at MEMS Prices and Terms and conditions Companies can have additional extensions to take advantage of the versatile, flexible and modular technology: Variable layer thicknesses Application-specific optimization of layer & material properties Application-specific functional add-on layers Companies with interest in the CMORE service platform should contact Maarten Willems at imec: Phone: +32 16 28 83 78 email: Maarten.Willems@imec.be CMORE web site: www.imec.be/cmore