TRONICS Microsystems
2011
2012
2013
N
D
J
F
M
A
S
O
MEMSOI 1)
2
1
Note: 1) Shipment is “Design submission deadline” +/- 104 days
Note:
MEMSCAP MUMPs
METALMUMPs 2)
28
4
PolyMUMPs 3)
3
27
20
25
SOIMUMPs 4)
12
Notes: 2) Shipment is “Design submission deadline” +/- 90 days 3) Shipment is “Design submission deadline” +/- 70 days 4) Shipment is “Design submission deadline” +/- 75 days
Notes:
imec SiGeMEMS
SiGeMEMS (passive)
SiGeMEMS/TSMC 0.18um CMOS (active) (CV018LD 1.8/3.3/32V)
10
25 (5)
Notes: 5) This run is preliminary and can be updated during 2012