Technologies > TSMC Overview


TSMC 90 nm technology overview (MPW):

  

TECHNOLOGY

Logic

Logic

Logic

Logic

Logic

Logic

MS/RF

MS/RF

MS/RF

MS/RF

MS/RF

Geometry

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

90 nm

Device Application

General Purpose

General Purpose

General Purpose

General Purpose

Low Power

Low Power

General Purpose

General Purpose

General Purpose

Low Power

Low Power

Core Voltage (V)

1.0 (1.2)

1.0 (1.2)

1.0 (1.2)

1.0 (1.2)

1.2 (1.4)

1.2 (1.4)

1

1

1

1.2

1.2

I/O Voltage (V)

1.8

2.5

3.3

1.8/3.3

2.5

3.3

2.5

3.3

1.8/3.3

2.5

3.3

Poly Layers

1

1

1

1

1

1

1

1

1

1

1

Metal Layers (Min)

3

3

3

3

3

3

3

3

3

3

3

Metal Layers (Max)

9

9

9

9

9

9

9

9

9

9

9

RO speed Std-Vt (ps/gate)

9.51053

9.51053

9.51053

9.51053

12.386

12.386

9.51053

9.51053

9.51053

12.386

12.386

RO speed High-Vt (ps/gate)

12.73504

12.73504

12.73504

12.73504

18.002

18.002

12.73504

12.73504

12.73504

18.002

18.002

RO speed Low-Vt (ps/gate)

7.67655

7.67655

7.67655

7.67655

11.025

11.025

7.67655

7.67655

7.67655

11.025

11.025

BEOL Dielectric

LK

LK

LK

LK

LK

LK

LK

LK

LK

LK

LK

BEOL Metal

ACU

ACU

ACU

ACU

ACU

ACU

ACU

ACU

ACU

ACU

ACU

PROCESS FEATURES










Well Formation

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Retrograde well

Isolation

STI

STI

STI

STI

STI

STI

STI

STI

STI

STI

STI

Gate Materials

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide

Silicide Material

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Cobalt-Silicide

Gate dielectric tox N (core)

23.3A+/-0.6

23.3A+/-0.6

23.3A+/-0.6

23.3A+/-0.6

28.3A+/-0.67

28.3A+/-0.67

23.3A+/-0.6

23.3A+/-0.6

23.3A+/-0.6

28.3A+/-0.67

28.3A+/-0.67

Gate dielectric tox P (core)

25.0A+/-0.6

25.0A+/-0.6

25.0A+/-0.6

25.0A+/-0.6

30.0A+/-0.67

30.0A+/-0.67

25.0A+/-0.6

25.0A+/-0.6

25.0A+/-0.6

30.0A+/-0.67

30.0A+/-0.67

Gate dielectric tox N (I/O)

34.5A+/-1.33

55.4A+/-3

72A+/-3

55.4A+/-3

72A+/-3

55.4A+/-3

72A+/-3

55.4A+/-3

72A+/-3

Gate Dielectric tox P (I/O)

37.0A+/-1.333

58.2A+/-3

75A+/-3

58.2A+/-3

75A+/-3

58.2A+/-3

75A+/-3

58.2A+/-3

75A+/-3

Emb-6T SRAM cell (um2)

0.999

0.999

0.999

0.999

0.999

0.999

1.27

1.27

1.27

1.27

1.27

DEVICE CHART (CORE)










nMOS--Isat (uA/um)

640

640

640

640

530

530

640

640

640

530

530

nMOS--Vt (V)

0.35

0.35

0.35

0.35

0.478

0.478

0.35

0.35

0.35

0.478

0.478

nMOS--Ioff_max (nA/um)

131.9

131.9

131.9

131.9

3.098

3.098

131.9

131.9

131.9

3.098

3.098

pMOS--Idsat (uA/um)

244

244

244

244

218

218

244

244

244

218

218

pMOS--Vt (V)

0.32

0.32

0.32

0.32

0.4

0.4

0.32

0.32

0.32

0.4

0.4

pMOS--Ioff_max (nA/um)

29.16

29.16

29.16

29.16

1.993

1.993

29.16

29.16

29.16

1.993

1.993

DEVICE CHART (I/O)










Vdd (V)

1.8

2.5

3.3

1.8/3.3

2.5

3.3

2.5

3.3

1.8/3.3

2.5

3.3

nMOS--Isat (uA/um)

660

580

580

660/580

580

580

580

580

660/580

580

580

nMOS--Vt (V)

0.4

0.5

0.6

0.4/0.6

0.5

0.6

0.5

0.6

0.4/0.6

0.5

0.6

nMOS--Ioff_max(nA/um)

0.3

0.3

0.3

0.3/0.3

0.3

0.3

0.3

0.3

0.3/0.3

0.3

0.3

pMOS--Idsat (uA/um)

300

290

290

300/290

290

290

290

290

300/290

290

290

pMOS--Vt (V)

0.45

0.5

0.6

0.45/0.6

0.5

0.6

0.5

0.6

0.45/0.6

0.5

0.6

pMOS--Ioff_max (nA/um)

0.3

0.3

0.3

0.3/0.3

0.3

0.3

0.3

0.3

0.3/0.3

0.3

0.3

MS/RF PROCESS MODULE

Core transistor Vt

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

High-Vt, Std-Vt, Low-Vt, Native

PiP

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

MiM

N/A

N/A

N/A

N/A

N/A

N/A

Q>50 for C=0.65pf
C=1.00pF/um2
C=1.50pF/um2
C=2.00pF/um2

Q>50 for C=0.65pf
C=1.00pF/um2
C=1.50pF/um2
C=2.00pF/um2

Q>50 for C=0.65pf
C=1.00pF/um2
C=1.50pF/um2
C=2.00pF/um2

Q>50 for C=0.65pf
C=1.00pF/um2
C=1.50pF/um2
C=2.00pF/um2

Q>50 for C=0.65pf
C=1.00pF/um2
C=1.50pF/um2
C=2.00pF/um2

MoM

þ

þ

þ

þ

þ

þ

þ

þ

þ

þ

þ

Inductor

N/A

N/A

N/A

N/A

N/A

N/A

3.4um (Cu) Q>9 for
L=5nH @2.4GHz

3.4um (Cu) Q>9 for
L=5nH @2.4GHz

3.4um (Cu) Q>9 for
L=5nH @2.4GHz

3.4um (Cu) Q>9 for
L=5nH @2.4GHz

3.4um (Cu) Q>9 for
L=5nH @2.4GHz

Hi Resistor

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

Varactor

N/A

N/A

N/A

N/A

N/A

N/A

þ

þ

þ

þ

þ

Triple Well

N/A

N/A

N/A

N/A

N/A

N/A

þ

þ

þ

þ

þ

BJT DEVICE

Hfe

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

VA (V)

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

BV ceo (V)

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

Ft (GHz)

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

Fmax (GHz)

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

MORE FEATURES

Default # of masks
(exclusive opt. masks)

39

39

39

39

36

36

36

36

36

36

36

# of optional masks

18

18

18

18

6

6

18

18

18

6

6

All Optional masks

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, VTH_N, VTC_N, VTH_P, ESD, FW_Cu

DNW, VTH_N, VTC_N, VTH_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, PW1V(TGO), VTH_N, VTC_N, PW2V(TGO), NW1V(TGO), VTH_P, NW2V(TGO), OD2(TGO), OD3(TGO), N2V(TGO), VTL_N, N3V(TGO), P2V(TGO), P3V(TGO), VTL_P, ESD, FW_Cu

DNW, VTH_N, VTC_N, VTH_P, ESD, FW_Cu

DNW, VTH_N, VTC_N, VTH_P, ESD, FW_Cu

EP MPW optional masks

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTL_N, VTL_P, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

DNW, VTC_N*, VTH_N, VTH_P, ESD, VIAD, MD, CBD, FW

Made in Fab

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Fab12, Fab14

Gate density (based on
TSMC's standard cell library)

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

436 Kgate/mm2

DESIGNKITS

Available PDK for Cadence

T-N90-CM-SP-013-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-004-K1

T-N90-CM-SP-004-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-013-K1

T-N90-CM-SP-004-K1

T-N90-CM-SP-004-K1

Available PDK for Mentor

T-N90-CM-SP-013-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-004-T1

T-N90-CM-SP-004-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-013-T1

T-N90-CM-SP-004-T1

T-N90-CM-SP-004-T1

Available iPDK for Synopsys

-

-

-

-

-

-

2 iPDK for MS/RF (CRN90LP, CRN90G)

2 iPDK for MS/RF (CRN90LP, CRN90G)

2 iPDK for MS/RF (CRN90LP, CRN90G)

2 iPDK for MS/RF (CRN90LP, CRN90G)

2 iPDK for MS/RF (CRN90LP, CRN90G)

     
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